Control of recoil losses in nanomechanical SiN membrane resonators

Year: 2016

Authors: Borrielli A., Marconi L., Marin F., Marino F., Morana B., Pandraud G., Pontin A., Prodi G.A., Sarro P.M., Serra E., Bonaldi M.

Autors Affiliation: Institute of Materials for Electronics and Magnetism, Nanoscience-Trento-FBK Division, 38123 Povo (TN), Italy;
Istituto Nazionale di Fisica Nucleare, TIFPA, 38123 Povo (TN), Italy;
CNR-INO, L.go Enrico Fermi 6, 50125 Firenze, Italy;
INFN, Sezione di Firenze, Via Sansone 1, 50019 Sesto Fiorentino (FI), Italy;
Dipartimento di Fisica e Astronomia, Universit`a di Firenze, Via Sansone 1, 50019 Sesto Fiorentino (FI), Italy;
LENS, Via Carrara 1, 50019 Sesto Fiorentino (FI), Italy;
Delft University of Technology, Else Kooi Laboratory, 2628 Delft, The Netherlands;
Dipartimento di Fisica, Università di Trento, 38123 Povo (TN), Italy

Abstract: In the context of a recoil damping analysis, we have designed and produced a membrane resonator equipped with a specific on-chip structure working as a “loss shield” for a circular membrane. In this device the vibrations of the membrane, with a quality factor of 10(7), reach the limit set by the intrinsic dissipation in silicon nitride, for all the modes and regardless of the modal shape, also at low frequency. Guided by our theoretical model of the loss shield, we describe the design rationale of the device, which can be used as effective replacement of commercial membrane resonators in advanced optomechanical setups, also at cryogenic temperatures.


Volume: 94 (12)      Pages from: 121403-1  to: 121403-5

More Information: This work has been supported by MIUR (“PRIN 2010-2011” and “QUANTOM”) and by INFN (“HUMOR” project). A.B. acknowledges support from the MIUR under the “FIRB-Futuro in ricerca 2013” funding program, project code RBFR13QUVI.
KeyWords: optomechanics, mechanical loss, mechanical resonator
DOI: 10.1103/PhysRevB.94.121403

Citations: 20
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