Tungsten oxide nanowires for chemical detection

Year: 2015

Authors: Zappa D., Bertuna A., Comini E., Molinari M., Poli N., Sberveglieri G.

Autors Affiliation: Sensor Laboratory, Università di Brescia and CNR-INO, Via Vallotti 9, 25133 Brescia, Italy

Abstract: Tungsten oxide nanowires have been synthesized on alumina substrates in order to fabricate sensing devices. Metallic tungsten films have been deposited by RF magnetron sputtering and then oxidized in a controlled atmosphere, in order to obtain a dense mat of nanowires. Two batches of samples have been prepared, starting from 18 nm and 180 nm tungsten films, and the influence of the sputtering temperature on the morphology has been investigated. Raman and XRD spectroscopies were used to confirm the crystalline structure of the material. The chemical sensing performance of n-type tungsten oxide nanowires has been evaluated towards some oxidizing and reducing species, together with the influence of relative humidity. Fabricated WO3 nanowires exhibit a very good sensitivity, especially for the detection of NH3, NO2 and CO.


Volume: 7 (5)      Pages from: 2203  to: 2209

More Information: The work has been supported by the Italian MIUR through the FIRB Project RBAP115AYN \”Oxides at the nanoscale: multi-functionality and applications\”. This work was partially supported by the European Community\’s 7th Framework Programme, under the grant agreement no. 246334 \”Orama: Materials for the Post-Silicon Electronics Era\” and under the grant agreement no. 611887 \”MSP: Multi Sensor Platform for Smart Building Management\”.
KeyWords: Metal Oxide; Nanowires; Chemical Sensors; Tungsten Oxide; WO3 thin films
DOI: 10.1039/c4ay02637c

Citations: 32
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