Nanoimprint lithography for nanophotonics in silicon
Year: 2008
Authors: Bruinink C. M., Burresi M., Boer M.J. de, Segerink F.B., Jansen H.V., Berenschot E., Reinhoudt D.N., Huskens J., Kuipers L.
Autors Affiliation: Molecular Nanofabrication Group, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, NL-7500 AE Enschede, The Netherlands; Transducer Science & Technology, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, NL-7500 AE Enschede, The Netherlands; Optical Sciences, MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, NL-7500 AE Enschede, The Netherlands, and Center for Nanophotonics, FOM Institute for Atomic, and Molecular Physics (AMOLF), Kruislaan 407, NL-1098 SJ Amsterdam, The Netherlands
Abstract: A novel inverse imprinting procedure for nanolithography is presented which offers a transfer accuracy and feature definition that is comparable to state-of-the-art nanofabrication techniques. We illustrate the fabrication quality of a demanding nanophotonic structure: a photonic crystal waveguide. Local examination using photon scanning tunneling microscopy (PSTM) shows that the resulting nanophotonic structures have excellent guiding properties at wavelengths in the telecommunications range, which indicates a high quality of the local structure and the overall periodicity.
Journal/Review: NANO LETTERS
Volume: 8 (9) Pages from: 2872 to: 2877
More Information: This research was supported by the MESA+ Institute for Nanotechnology and is part of the Strategic Research Orientations \”Advanced Photonic Structures\” and \”Nanofabrication\”. This work was also partially supported by NanoNed, a nanotechnology program of the Dutch Ministry of Economic Affairs. Of the CMAL/MESA+, Mark A. Smithers is acknowledged for operating the high-resolution SEM.DOI: 10.1021/nl801615cImpactFactor: 10.371Citations: 20data from “WEB OF SCIENCE” (of Thomson Reuters) are update at: 2024-09-29References taken from IsiWeb of Knowledge: (subscribers only)Connecting to view paper tab on IsiWeb: Click hereConnecting to view citations from IsiWeb: Click here