Scanning probe microscopy as a tool for nanoimprint lithography

Year: 2007

Authors: Pingue P., Dinelli F., Baschieri P., Ascoli C., Menozzi C., Facci P., Beltram F.

Autors Affiliation:

Journal/Review: JOURNAL OF THE OPTICAL SOCIETY OF AMERICA B-OPTICAL PHYSICS

KeyWords: Nanolitografia; AFM; FIB

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