Resolving surface details with reflection and fluorescence video-confocal profilometry

Year: 2007

Authors: Benedetti P.A., Guidarini D., Cristoforetti G., Legnaioli S., Palleschi V., Salvetti A., Spiniello R., Tognoni E.

Autors Affiliation: IPCF-CNR, Institute for Chemical and Physical Processes, National Research Council, Via Moruzzi 1, 56124 Pisa, Italy

Abstract: Video-confocal profilometry has been exploited to characterize reflecting and non-reflecting surfaces in materials with tilted and corrugated areas. An alternative method based on fluorescence detection has been developed and tested to characterize metal surfaces modified by intense laser irradiation. Combined representations of surface topography have been obtained on the basis of both reflectance and fluorescence signals. A discussion of results and problems encountered in reflection and fluorescence based techniques is provided. (c) 2006 Published by Elsevier Ltd.

Journal/Review: MICRON

Volume: 38 (2)      Pages from: 104  to: 108

KeyWords: Confocal microscopy; Fluorescence; Laser ablation; Metals; Optical sections; Profilometry; Reflection; Surfaces; Topography; Video-confocal microscopy
DOI: 10.1016/j.micron.2006.07.005

Citations: 4
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