Mesoporous silicon gas sensors: design, fabrication and conduction model

Year: 2015

Authors: Fabbri B., Guidi V., Malagu C., Zonta G., Calabrese G., Gherardi S., Spizzo F., Gaiardo A., Giberti A., Boldrini V.

Autors Affiliation: Univ Ferrara, Dept Phys & Earth Sci, Via Saragat 1-c, I-44122 Ferrara, Italy; CNR, INO, I-50124 Florence, Italy; Bruno Kessler Fdn, I-38123 Trento, Italy; MIST ER Scrl, I-40129 Bologna, Italy;‎ Univ Padua, Dept Phys & Astron, I-35131 Padua, Italy

Abstract: Most chemoresistive gas sensors are supported by an insulating substrate, not integrable into silicon IC platforms, and need very high temperature to reach operating performance, this implies energy consumption and a risk factor in the presence of flammable gases. Therefore, porous silicon substrates represent a good choice, thanks to its chemical and physical properties. In this work we designed mesoporous silicon as substrate for gas sensors, and provided a theoretical investigation about the p-Si/PS/gas interface, by analysing the semiconductor band bending at the interface, the formation of a Schottky barrier and the consequent pinning of the Fermi level, due to the high density of surface states in porous silicon. The theoretical considerations have been verified through the experimental measurements with sensors based on p-Si substrate.

Conference title:

KeyWords: porous silicon; gas sensors; room temperature; humidity