Ultrathin Gas Permeable Oxide Membranes for Chemical Sensing: Nanoporous Ta2O5 Test Study

Year: 2015

Authors: Imbault A., Wang Y., Kruse P., Strelcov E., Comini E., Sberveglieri G., Kolmakov A.

Autors Affiliation: McMaster Univ, Dept Chem & Chem Biol, Hamilton, ON L8S 4M1, Canada; Oak Ridge Natl Lab, Inst Funct Imaging Mat, Oak Ridge, TN 37831 USA; Oak Ridge Natl Lab, Ctr Nanophase Mat Sci, Oak Ridge, TN 37831 USA; Univ Brescia, Dept Informat Engn, SENSOR Lab, I-25133 Brescia, Italy; CNR INO, I-25133 Brescia, Italy; So Illinois Univ, Dept Phys, Carbondale, IL 62901 USA

Abstract: Conductometric gas sensors made of gas permeable metal oxide ultrathin membranes can combine the functions of a selective filter, preconcentrator, and sensing element and thus can be particularly promising for the active sampling of diluted analytes. Here we report a case study of the electron transport and gas sensing properties of such a membrane made of nanoporous Ta2O5. These membranes demonstrated a noticeable chemical sensitivity toward ammonia, ethanol, and acetone at high temperatures above 400 degrees C. Different from traditional thin films, such gas permeable, ultrathin gas sensing elements can be made suspended enabling advanced architectures of ultrasensitive analytical systems operating at high temperatures and in harsh environments

Journal/Review: MATERIALS

Volume: 8 (10)      Pages from: 6677  to: 6684

KeyWords: Ta2O5; metal oxide; ultrathin membrane; gas sensor; gas permeability
DOI: 10.3390/ma8105333

Citations: 7
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