Distance sensing and surface profiling with a spectral optical probe

Year: 1987

Authors: Francini F., Molesini G., Quercioli F., Tiribilli B.

Autors Affiliation: Istituto Nazionale di Ottica, Largo Enrico Fermi 6, Firenze, 50125, Italy

Abstract: A prototype instrument is presented that performs short distance monitoring and surface profile reconstruction. The approach is fully optical, based on the longitudinal chromatic aberration of a special lens. Examples of operation, data reduction and information display are reported.

Conference title:

KeyWords: optical profilometry; distance sensing; optical probe; optical metrology;
DOI: 10.1117/12.937062