Scanning aspherical surfaces with the focus-wavelength encoded profilometer

Year: 1986

Authors: Francini F., Molesini G., Quercioli F., Tiribilli B.

Autors Affiliation: Istituto Nazionale di Ottica, Largo Enrico Fermi, Firenze, 50125, Italy

Abstract: New developments with the focus-wavelength encoded optical profilometer are reported in the area of applications to surface contouring. Longitudinal chromatic dispersion of a suitably designed lens as a probe is exploited to obtain distance information between the probe and the surface. After proper scanning, the surface topography is recovered.

Conference title:

KeyWords: Optical instruments; Surface, contour measurement; Aspherical surfaces; Chromatic dispersion; Focus-wavelength encoding; Optical profilometer; Surface topography, optical systems
DOI: 10.1117/12.964477