Scientific Results


Author: Lucchesini Alessandro Category: Papers Journals 

1) Resolution limitation in EBL optical grating fabrication on InGaAsP/InP substrate
By: Gentili M., Gella L., Lucchesini A., Meneghini G.(*), Scopa L. Year: 1990 (Cit.: 0)

2) Micron and submicron electron beam lithography by the monoresist technique.
By: Gentili M., Petrocco G., Lucchesini A., Chiesa W.(1), Ronzoni F.(1), D’Amico A.(2) Year: 1987 (Cit.: 0)

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