Calibration of absolute planarity flats: generalized iterative approach

Anno: 2012

Autori: Vannoni M., Sordini A., Molesini G.

Affiliazione autori: CNR — Istituto Nazionale di Ottica, Largo E. Fermi 6, Firenze 50125, Italy

Abstract: Absolute planarity measurement with interferometric data and iterative surface recovering approaches is briefly reviewed. Extension to the case of multiple measurements is outlined, and demonstration with synthetic data is provided. A generalized approach is finally presented, making use of operators representing the manipulations occurred with the surfaces taking part in the generation of the interferograms. The potential advantages of the new interferogram processing technique are pointed out. (C) 2012 Society of Photo-Optical Instrumentation Engineers (SPIE).

Giornale/Rivista: OPTICAL ENGINEERING

Volume: 51 (8)      Da Pagina: 081510  A: 081510

Parole chiavi: Generalized iterative approaches; Interferogram processing; Interferograms; Interferometric data; Iterative algorithm; Multiple measurements; Planarity; Synthetic data, Algorithms; Iterative methods, Interferometry
DOI: 10.1117/1.OE.51.8.081510

Citazioni: 15
dati da “WEB OF SCIENCE” (of Thomson Reuters) aggiornati al: 2025-03-16
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