Sensing Properties of E-Beam Evaporated Nanostructured Pure and Iron-Doped Tungsten Oxide Thin Films

Anno: 2011

Autori: Ahsan M., Tesfamichael T., Ponzoni A., Faglia G.

Affiliazione autori: Queensland Univ Technol, Sch Engn Syst, Brisbane, Qld 4000, Australia;
Univ Brescia, SENSOR Lab, I-25121 Brescia, Italy;
IDASC CNR, I-25121 Brescia, Italy

Abstract: Gas sensing properties of nanostructured pure and iron-doped WO(3) thin films are discussed. Electron beam evaporation technique has been used to obtain nanostructured thin films of WO(3) and WO(3):Fe with small grain size and porosity. Atomic force microscopy has been employed to study the microstructure. High sensitivity of both films towards NO(2) is observed. Doping of the tungsten oxide film with Fe decreased the material resistance by a factor of about 30 when exposed to 5 ppm NO(2). The high sensitivity is attributed to an improved microstructure of the films obtained through e-beam evaporation technique, and subsequent annealing at 300 degrees C for 1 hour.

Giornale/Rivista: SENSOR LETTERS

Volume: 9 (2)      Da Pagina: 759  A: 762

Parole chiavi: Metal oxide gas sensors; Tungsten Trioxide;
DOI: 10.1166/sl.2011.1610

Citazioni: 4
dati da “WEB OF SCIENCE” (of Thomson Reuters) aggiornati al: 2025-05-18
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