An optical probe based on spherical aberration for surface figure testing

Anno: 1989

Autori: Quercioli F., Trivi M., Molesini G., Melozzi M.

Affiliazione autori: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy;
Officine Galileo, Campi Bisenzio

Abstract: An optical distance sensor is presented that utilizes longitudinal spherical aberration to probe and monitor the height distribution of a reflective sample. The surface shape parameters are recovered after scanning. The working principle is discussed in terms of optical design data, and the actual performance of a laboratory setup is demonstrated accordingly.

Giornale/Rivista: OPTICS COMMUNICATIONS

Volume: 71 (1-2)      Da Pagina: 11  A: 14

Parole chiavi: Laser Beams–Applications; Sensors; Surfaces–Contour Measurement, Optical Distance Sensors; Spherical Aberration; Surface Figure Testing; Optical Devices; Optical probe; Optical profilometry
DOI: 10.1016/0030-4018(89)90294-0

Citazioni: 2
dati da “WEB OF SCIENCE” (of Thomson Reuters) aggiornati al: 2025-05-18
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