Focus-wavelength encoded optical profilometer

Anno: 1984

Autori: Molesini G., Pedrini G., Poggi P., Quercioli F.

Affiliazione autori: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy

Abstract: An optical profilometer is presented working on the principle of focus multiplexing by wavelength encoding. Decoding is performed by lateral dispersion. A detector array shows up a signal distribution whose features accurately monitor the surface position of the sample under test. Versatility, accuracy and dynamical range are the most interesting characteristics of this approach.

Giornale/Rivista: OPTICS COMMUNICATIONS

Volume: 49 (4)      Da Pagina: 229  A: 233

Parole chiavi: Optical profilometry; Chromatic sensors; Optical instruments
DOI: 10.1016/0030-4018(84)90179-2

Citazioni: 151
dati da “WEB OF SCIENCE” (of Thomson Reuters) aggiornati al: 2025-05-18
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