A fast optical profilometer

Anno: 1983

Autori: Bertani D., Cetica M., Ciliberto S.

Affiliazione autori: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy

Abstract: A simple optical profilometer is described for the measurement of surface profiles. The device is based on the use of a photodiode array that allows a fast examination of the surface and a high sensitivity. It also overcomes the randomness requirements which limit the use of optical devices working on angular diagram or speckle correlation measurements. Preliminary measurements of workpieces profiles are shown.

Giornale/Rivista: OPTICS COMMUNICATIONS

Volume: 46 (1)      Da Pagina: 1  A: 3

Parole chiavi: optical profilometer
DOI: 10.1016/0030-4018(83)90018-4

Citazioni: 7
dati da “WEB OF SCIENCE” (of Thomson Reuters) aggiornati al: 2025-05-18
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