Parallelism error characterization with mechanical and interferometric methods
Anno: 2007
Autori: Vannoni M., Bertozzi R.
Affiliazione autori: CNR – Istituto Nazionale di Ottica Applicata, Centro SIT n. 130, Largo E. Fermi 6, 50125 Firenze, Italy;
CERMET, Centro SIT n. 52, Via Cadriano 23, 40027 Cadriano di Granarolo (BO), Italy
Abstract: Two methods for measuring the parallelism error of gauge blocks are discussed. The first method makes use of contact probes, sampling the gauge thickness at fixed locations; the parallelism error is given by the difference between maximum and minimum thickness over the sampled area. The second method is based on interferometry, producing the height maps of the opposing surfaces with respect to one another; the parallelism error is obtained after processing of the interferometric data. The two methods have been implemented in different laboratories, and compared by measuring five different gauge blocks. The results are reported, showing that the first method is more straightforward and simple, but requires prior calibration and provides information only on a limited number of sample points. The second method is more demanding in terms of equipment and measuring procedure, but in principle it is an absolute method, and provides information over a large number of data points. (C) 2006 Elsevier Ltd. All rights reserved.
Giornale/Rivista: OPTICS AND LASERS IN ENGINEERING
Volume: 45 (6) Da Pagina: 719 A: 722
Parole chiavi: parallelism error; gauge blocks; metrology comparisonDOI: 10.1016/j.optlaseng.2006.10.010Citazioni: 8dati da “WEB OF SCIENCE” (of Thomson Reuters) aggiornati al: 2025-05-18Riferimenti tratti da Isi Web of Knowledge: (solo abbonati) Link per visualizzare la scheda su IsiWeb: Clicca quiLink per visualizzare la citazioni su IsiWeb: Clicca qui
