Multiparametric porous silicon sensors
Anno: 2002
Autori: Baratto C., Faglia G., Sberveglieri G., Gaburro Z., Pancheri L., Oton C., Pavesi L.
Affiliazione autori: Univ Brescia, Dept Chem & Phys, I-25133 Brescia, Italy; Univ Trent, INFM, I-38050 Povo, Tn, Italy; Univ Trent, Dept Phys, I-38050 Povo, Tn, Italy.
Abstract: We investigated the possibility of using several sensing parameters from porous silicon in order to improve gas selectivity. By fabricating porous silicon optical microcavities, three independent quantities can be measured, i. e. the electrical conductance, the photoluminescence intensity, and the wavelength of the optical resonance. We monitored the change of these three parameters as a function of NO2 (0.5-5 ppm), ethanol (300-15000 ppm) and relative humidity (0-100%). Preliminary results confirm that the examined species affect the parameters in a different way, both as a relative change and as dynamic.
Giornale/Rivista: SENSORS
Volume: 2 (3) Da Pagina: 121 A: 126
Parole chiavi: porous silicon; optical microcavity; gas sensor; nitrogen dioxideDOI: 10.3390/s20300121Citazioni: 78dati da “WEB OF SCIENCE” (of Thomson Reuters) aggiornati al: 2025-06-01Riferimenti tratti da Isi Web of Knowledge: (solo abbonati)
