Optical surface profile transducer

Anno: 1988

Autori: Quercioli F., Tiribilli B., Molesini G.

Affiliazione autori: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy

Abstract: A noncontacting electro-optical probe is presented that is capable of monitoring the surface height of a sample in ranges of interest for mechanical tooling machines. The surface microtopography is reconstructed after scanning. The working principle is based on monotonic longitudinal chromatic aberration of a lens. Characteristics of a designed lens are reported, along with interferometric testing data on a fabricated prototype. Calibration curves of the complete device are given. After interfacing to a personal computer, automatic probing and scanning are implemented. Results on selected samples are presented.

Giornale/Rivista: OPTICAL ENGINEERING

Volume: 27 (2)      Da Pagina: 135  A: 142

Parole chiavi: Electrooptical devices; Lenses – Design; Optical instruments; Transducers, Automatic probing; Chromatic aberration; Electrooptical probe; Mechanical tooling machines; Surface profile; Surfaces
DOI: 10.1117/12.7976658

Citazioni: 8
dati da “WEB OF SCIENCE” (of Thomson Reuters) aggiornati al: 2025-05-18
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