Iterative algorithm for three flat test

Anno: 2007

Autori: Vannoni M., Molesini G.

Affiliazione autori: CNR – Istituto Nazionale di Ottica Applicata, Largo E. Fermi 6, 50125 Firenze, Italy

Abstract: Absolute planarity measurements by interferometry are classically made using three flats, compared two by two in the course of four or more tests. Data reduction is performed with various analytical methods. Here we present instead a data processing algorithm that converges to solution numerically by iteration. Examples are presented both on synthetic interferograms and on experimental data. High accuracy and versatility of the approach are demonstrated. (C) 2006 Optical Society of America.

Giornale/Rivista: OPTICS EXPRESS

Volume: 15 (11)      Da Pagina: 6809  A: 6816

Parole chiavi: Instrumentation, measurement, metrology; Interferometry; Metrology; Optical standards and testing; Surface measurements, figure
DOI: 10.1364/OE.15.006809

Citazioni: 51
dati da “WEB OF SCIENCE” (of Thomson Reuters) aggiornati al: 2025-05-18
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