Scientific Results

MEMS characterization by digital holography

Year: 2005

Authors: Coppola G., Striano V., Ferraro P., Grilli S., Alfieri D., De Nicola S., Finizio A., Pierattini G., Javidi B.

Autors Affiliation: CNR-IMM, CNR-INOA, CNR-ICIB, University of Connecticut

Journal/Review:

KeyWords: MEMS; digital holography;