Monitoring the optical thickness of transparency films by homodyne interferometry

Year: 1996

Authors: Greco V., Trivi M., Molesini G.

Autors Affiliation: Istituto Nazionale di Ottica, Largo e. Fermi 6, 50125 Firenze, Italy

Conference title: Applied Optics and Opto-Electronics 1996
Place: Reading

KeyWords: Homodyne interferometry; optical metrology;