Interferometric calibration of optical parallels

Year: 1999

Authors: Greco V., Marchesini F., Molesini G.

Autors Affiliation: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy

Conference title: 1st International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN)
Place: Bremen

KeyWords: Form metrology; optical testing; parallelism