Thickness measurement of thin transparent plates with a broad-band wavelength scanning interferometer
Anno: 2004
Autori: Maddaloni P., Coppola G., De Natale P., De Nicola S., Ferraro P., Gioffrè M., Iodice M.
Affiliazione autori: Istituto Nazionale di Ottica Applicata, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy;
Istituto per la Microelettronica e i Microsistemi (IMM) del CNR, Via P. Castellino 111, 80131, Napoli, Italy;
Istituto di Cibernetica del CNR, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy
Abstract: A novel broad-band telecom laser source is used to make a lateral-shear scanning-wavelength interferometer for measuring the thickness of thin plates. We show that the wide tunability range allows us to detect samples down to tens of microns with a relative uncertainty of less than 0.5%. A comparable accuracy in the thickness characterization of double-layer structures is also demonstrated. In turn, the wide tunability range needs the dispersion law of the materials to be taken into account in the model for correct thickness evaluation, although simultaneous measurement of dispersion and thickness are in principle possible with this technique.
Giornale/Rivista: IEEE PHOTONICS TECHNOLOGY LETTERS
Volume: 16 (5) Da Pagina: 1349 A: 1351
Parole chiavi: Dielectric materials; Dispersion (waves); Interferometers; Interferometry; Numerical methods; Reflection; Refractive index; Silica; Silicon; Thickness measurement, Broadband wavelength scanning interferometer; Thin transparent plates; Tunability, Fiber lasersDOI: 10.1109/LPT.2004.826150Citazioni: 9dati da “WEB OF SCIENCE” (of Thomson Reuters) aggiornati al: 2024-10-13Riferimenti tratti da Isi Web of Knowledge: (solo abbonati) Link per visualizzare la scheda su IsiWeb: Clicca quiLink per visualizzare la citazioni su IsiWeb: Clicca qui