Early stages of growth and nanostructure of Pb(Zr,Ti)O3 thin films observed by atomic force microscopy

Anno: 1998

Autori: Craciun F., Verardi P., Dinescu M., Dinelli F., Kolosov O.

Affiliazione autori: CNR Istituto di Acustica, via del Fosso del Cavaliere 100, I-00133, Rome, Italy; Laser Department, INFPLR, P.O. Box MG-16, RO-76900Bucharest, Romania;
Department of Materials, University of Oxford, Oxford, United Kingdom

Abstract: We prepared lead zirconate-titanate (PZT) layers with different thicknesses on Au coated Si(100) and Si(111) wafers by pulsed laser deposition, using the same set of experimental conditions: a Nd-YAG laser, 1064 nm, 10 ns, 10 Hz, substrate temperature 370°C, oxygen pressure 150 mTorr, laser fluence 25 J/cm(2), by varying the number of laser pulses. Different analysis put in evidence the crystallographic structure and chemical composition of films. Surface morphology was examined by atomic force microscopy (AFM). Analysis of films with very few atomic layers suggests that the growth proceeds by Volmer-Weber island-growth mechanism. Different geometrical, chemical and kinetic factors responsible for this type of growth are discussed. Comparative AFM analyses of surface roughness performed on films with different thickness allow for the study of the interface width evolution during the growth and to predict the conditions for obtaining films with a smooth surface.

Giornale/Rivista: THIN SOLID FILMS

Volume: 336 (1-2)      Da Pagina: 281  A: 285

Maggiori informazioni: Conference: Symposium on Thin Films Epitaxial Growth and Nanostructures, at the E-MRS Spring Meeting 1998
Location: STRASBOURG, FRANCE – Date: JUN 16-19, 1998
Sponsor(s):European Mat. Res. Soc.
Parole chiavi: Piezoelectric thin Ælms; Pulsed laser deposition; Atomic force microscopy (AFM); Nanostructure; Kinetic roughening

DOI: 10.1016/S0040-6090(98)01283-8

Citazioni: 3
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