Absolute measurement of planarity with Fritz’s method: uncertainty evaluation
Anno: 1999
Autori: Greco V., Tronconi R., Del Vecchio C., Trivi M., Molesini G.
Affiliazione autori: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy; Osservatorio Astrofisico di Arcetri. Largo E. Fermi 5, 50125 Firenze, Italy;
Centro de Investigaciones Opticas, Comision Investigaciones Cientificas Provincia Buenos Aires e Facultad de Ingenieria, Universidad La Plata, La Plata, Argentina
Abstract: Fritz’s method [Opt. Eng. 23, 379 (1984)] of using Zernike polynomials to assess the absolute planarity of test plates is revisited. A refinement is described that takes into account the data decorrelation that appears in experiments. An uncertainty balance is defined by propagation of error contributions through the steps of the method. The resultant measuring procedure is demonstrated on a data set from experiments, and a nanometer level of uncertainty is achieved.
Giornale/Rivista: APPLIED OPTICS
Volume: 38 (10) Da Pagina: 2018 A: 2027
Parole chiavi: optical surfaces; absolute planarity; calibration; optical testing; optical metrologyDOI: 10.1364/AO.38.002018Citazioni: 31dati da “WEB OF SCIENCE” (of Thomson Reuters) aggiornati al: 2024-04-28Riferimenti tratti da Isi Web of Knowledge: (solo abbonati) Link per visualizzare la scheda su IsiWeb: Clicca quiLink per visualizzare la citazioni su IsiWeb: Clicca qui