High-resolution angular and displacement sensing based on the excitation of surface plasma waves
Anno: 1997
Autori: Margheri G., Mannoni A., Quercioli F.
Affiliazione autori: Istituto Nazionale di Ottica, Largo E. Fermi 6, Firenze 50125, Italy
Abstract: The possibility of building angular and displacement sensors based on the phenomenon of attenuated total reflection (ATR) is explored both numerically and experimentally. ATR occurs when a surface wave is excited by an incoming TM electromagnetic wave through a resonant phase-matching process, as in the Kretschmann coupling scheme. The reflected intensity strongly depends on the angle of incidence of the beam. We first show some computations of the sensitivity and the linearity of an ATR-based sensor, then proceed to the experiment, illustrating how an angular resolution of the order of 0.1 are sec can be obtained with moderate effort. Finally me show how the sensor, combined with a simple optical arrangement, can be used to detect and measure nanometric displacements, as those provided by piezoelectric actuators.
Giornale/Rivista: APPLIED OPTICS (2004)
Volume: 36 (19) Da Pagina: 4521 A: 4525
Parole chiavi: Actuators; Angle measurement; Computational methods; Distance measurement; Light absorption; Light reflection; Piezoelectric devices; Plasma waves; Sensitivity analysis; Surface waves, Angular sensors; Attenuated total reflection; Displacement sensors, Optical sensorsDOI: 10.1364/AO.36.004521Citazioni: 29dati da “WEB OF SCIENCE” (of Thomson Reuters) aggiornati al: 2024-05-12Riferimenti tratti da Isi Web of Knowledge: (solo abbonati) Link per visualizzare la scheda su IsiWeb: Clicca quiLink per visualizzare la citazioni su IsiWeb: Clicca qui