Focus-wavelength encoded optical profilometer
Anno: 1984
Autori: Molesini G., Pedrini G., Poggi P., Quercioli F.
Affiliazione autori: Istituto Nazionale di Ottica, Largo E. Fermi 6, 50125 Firenze, Italy
Abstract: An optical profilometer is presented working on the principle of focus multiplexing by wavelength encoding. Decoding is performed by lateral dispersion. A detector array shows up a signal distribution whose features accurately monitor the surface position of the sample under test. Versatility, accuracy and dynamical range are the most interesting characteristics of this approach.
Giornale/Rivista: OPTICS COMMUNICATIONS (PRINT)
Volume: 49 (4) Da Pagina: 229 A: 233
Parole chiavi: Optical profilometry; Chromatic sensors; Optical instrumentsDOI: 10.1016/0030-4018(84)90179-2Citazioni: 75dati da “WEB OF SCIENCE” (of Thomson Reuters) aggiornati al: 2024-04-28Riferimenti tratti da Isi Web of Knowledge: (solo abbonati)