Fabrication of sub-micron period surface structures in LiNbO3
Anno: 2007
Autori: Grilli S., Ferraro P., Sansone L., Paturzo M., De Natale P.
Affiliazione autori: CNR – Istituto Nazionale di Ottica Applicata, Via Campi Flegrei 34, 80078 Pozzuoli (NA), Italy
Abstract: Sub-micron period reversed domain patterns are fabricated in congruent LiNbO3 by using electric field overpoling. Slight wet etching of the domain engineered samples in HF solution generates surface relief structures faithfully reproducing the resist pattern geometries generatedby holographic lithography. Moire holographic lithography is also used tojabricate more complicated resist templates to be transferred onto the LiNbO3 substrates as surface structures. A wide variety ofstructures is presented and discussed. The preliminary results show the possibility to use the fabricated structures for the realization qfphotonic crystal devices such as Bragg gratings, micro-ring resonators, etc. for telecom applications.
Giornale/Rivista:
Volume: 352 Da Pagina: 320 A: 325
Parole chiavi: lithium niobateDOI: 10.1080/0015190701358142Citazioni: 1dati da “WEB OF SCIENCE” (of Thomson Reuters) aggiornati al: 2024-05-05Riferimenti tratti da Isi Web of Knowledge: (solo abbonati) Link per visualizzare la scheda su IsiWeb: Clicca quiLink per visualizzare la citazioni su IsiWeb: Clicca qui